Wafer Pre-Aligner - Bluecord Technology Inc.

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Wafer Pre-Aligner

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Semiconductor Equipment System

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Bluecord Technology Inc.
[Korea]

Address:
59-4 Haam-dong Yuseong-gu Daejeon 305-348 Korea

Phone:
82-42-6014551

Contact name:
Jinyoung Kang , Director

Semiconductor Equipment System

	Wafer Pre-Aligner

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The WP20300C pre-aligner aligns the wafers(flat and notch type) with an angular repeatability of ±0.035° and adjusts the center of wafers with a repeatability of ±0.05mm.
The WP20300C can accommodate wafers up to 300mm. These are also compatible with Class 1 clean room.