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* Software : GUI-based Operation Software, Customized menu
* Hardware : IBM compatible Pentium PC 16MB RAM, 1.6GB HDD
& 1FDD, 12.1" TFT LCD monitor
* Auto-nest : 4 Cassette Load Ports, exact position recovery
system
* Mapping Sensor : Reliable mapping sensor is installed
onto the robot arm
* None-contact Prealigner : Wafer centering and flat(or
notch) aligning by the 2-dimensional vision system
* OCR : Automated illumination adjustment for reliable/repeatable
wafer ID(Bar code) reading
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