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* Software : GUI-based Operation Software, Customized menu
* Hardware : IBM compatible Pentium PC, 128MB RAM, 4GB HDD
& 1FDD, 12.1" TFT LCD monitor
* Robot : Field proven repeatable and reliable robot
* Stages : Source cassette stage : 4 stages, Target cassette
stage : 16 stages
* Pre-aligner : Non-contact, ultra-high resolution CCD sensor
type
* Wafer mapping system : fast scanning speed and perfect
wafer mapping
* OCR : Reliable and repeatable wafer ID(Bar code) reading
for Front and back side
* References
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